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Vacuum Process Monitoring Systems
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PPR Series Process Monitoring Systems
  • 0.01, 0.1, 1.0 or 10 Torr inlet pressure
  • 3 × 10-5 Torr-L/s flow rate
  • 2 second response time (0.1 Torr)
  • 100, 200 or 300 amu systems
UGAPM Series Process Monitoring Systems
  • 0.001 to 20 Torr inlet pressure
  • WIndows software
  • <1.5 second response time (0.1 Torr)
  • 100, 200 or 300 amu systems
CIS Residual Gas Analyzer
  • 100, 200, and 300 amu systems
  • 1 ppm detection
  • 10 mTorr max. operating pressure
  • 1 x 10-12 Torr detection limit
  • Real-time RGA Windows software
  • Multi-head operation
  • RGA and CIS mode

Phone: (408)744-9040 • Fax: (408)744-9049 • email: info@thinkSRS.comwww.thinkSRS.com