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High Pressure Gas Analyzer UGA ... from $28,000
UGA Series Up to 300 amu gas analyzers
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UGA Series Gas Analyzers
  • Operates from atmospheric
    pressure to UHV
  • 100, 200 and 300 amu systems
  • Fast response time
  • Windows software
  • Stand alone leak detection
  • Electron multiplier
  • Measure up to 100% H2 with
    UGA-Hydrogen (UGA w/opt. 3)
  • Low cost solutions (ULT)
The UGA and ULT Series Universal Gas Analyzers are state-of-the-art bench top mass spectrometers that operate from above atmospheric pressure to UHV. They are ideal for on-line monitoring and analysis of gas mixtures. Whether you’re measuring trace-level contaminants, solvents, hydrocarbons, refrigerants or corrosive gases, your Universal Gas analyzer is up to the task.
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UGA Series Atmospheric Pressure Gas Analyzers

UGA series ideal for corrosive gases

UGA-Hydrogen series (UGA w/opt. 3) ideal for high concentration of H2

ULT series low cost solution (starting at $28,000)

The UGA and ULT Series Universal Gas Analyzers are state-of-the-art bench top mass spectrometers that operate from above atmospheric pressure to UHV. They are ideal for on-line monitoring and analysis of gas mixtures. Whether you’re measuring trace-level contaminants, solvents, hydrocarbons, refrigerants or corrosive gases, your Universal Gas analyzer is up to the task.

UGA applications include semiconductor exhaust gas monitoring, glove box analysis, fuel cell studies, Freon detection, pollution monitoring, fermentation studies and general R&D vacuum analysis.

These analyzers are also simple to operate and maintain. The chassis design allows the instrument to be operated vertically or horizontally, and both front-panel and computer operation are supported. The ULT series is a simplified design for less demanding applications.

Principle of operation

The UGA system uses a two-stage pressure reducing inlet to sample gases at atmospheric pressure. After the pressure is reduced to around 10-6 Torr, the gas stream is sent to a mass spectrometer (residual gas analyzer - RGA) which measures the concentration of each mass of interest.

The UGA Windows software provides a graphical user interface for complex graphing and data analysis. The software also allows remote control of the system’s valves, heaters and pumps.

For gas sampling in the range of 10-1 to 10-4 Torr, the vacuum inlet assembly is used. Simply attach a
2 ¾” CF to ¼” tube adapter to one of the CF ports, and adjust the length of the tube for the inlet pressure.

Direct access to the RGA is provided for UHV applications (<10-4 Torr). Any of the 2 ¾” CF ports of the vacuum inlet assembly can be used to connect to your vacuum chamber.

Multi-capillary inlet (UGA series only)

An optional multi-port sampling inlet consists of 16 manifold-mounted valves that can be used with a variety of capillaries.

Heated chamber (UGA series only)

The UGA system is equipped with individual heaters for the vacuum chamber (including RGA), the turbo pump connector, and the vacuum inlet assembly. During bakeout, the system can be heated to 120 °C.

Dual-diaphragm pumps (UGA series only)

Separate diaphragm pumps are used to handle the bypass flow and backing of the turbo pump. This architecture allows corrosive gases (chlorine, fluorine, etc.) to be analyzed without damaging the RGA and turbo pump, and virtually eliminates the problem of back streaming. Measuring high concentrations of low mass gases (hydrogen, helium, etc.) is no longer a problem.

Turbo pump venting (UGA and ULT)

An optional valve and inlet to the turbo pump’s exhaust is available for users who wish to vent with dry nitrogen (or other inert gases). This keeps the pump free from water and other contaminants present in air.

Using your Universal Gas Analyzer

The UGA system can be controlled from the front-panel or from a computer. A choice of manual or auto-control of all system components is provided.

Data is measured and displayed using the UGA software. The intuitive user interface allows measurements to be made quickly and easily. Data is captured and displayed in real-time, or scheduled for acquisition at a specified time.

Features include analog and histogram scan modes, pressure vs. time plots, leak detection, gas library, and on-line help.

RGA parameters can also be controlled and monitored through a high-level ASCII command set. Standard RS-232 and Ethernet interfaces are used as the data link to your PC.

Best value

The UGA Analyzers offer the best value of any system currently available. They provide more performance, better features, and are priced well below the competition.

 

 

Phone: (408)744-9040 • Fax: (408)744-9049 • email: info@thinkSRS.comwww.thinkSRS.com

UGA Series Atmospheric Pressure Gas Analyzers
Inlet* (UGA series)
Type   Stainless steel and PEEK capillaries, two extra 2-3/4" CF ports
Flowrate 1 to 10 milliliter per minute at atmospheric pressure
Pressure About 10-4 mbar to several bar
(depending on connecting ports and capillary)
Mass Spectrometer
Type Quadrupole (RGA)
Detector Faraday cup and electron multiplier
Range 100, 200 or 300 atomic mass units (amu)
Resolution Better than 0.5 amu at 10 % of peak height
Detection limit Less than 1 ppm
Operating pressure 5 × 10-6 mbar
Connections* (UGA series)
Sample Inlet
    1 mbar to 1 bar 1/8" Ultra-Torr® fitting
    10-1 to 10-4 mbar 2-3/4" CF flange port
    <10-4 mbar 2-3/4" CF flange port
    Computer interface RS-232, Ethernet
UGA software
Software Windows application. Controls UGA system including RGA.
System
High-vacuum pump Hybrid turbo-molecular
Diaphragm pump Advanced low pressure
Materials
Construction SS304 and SS316
Insulators Alumina, ceramic
Seals Viton®, buna-N, and nitrile butyl rubber, copper gasket
Miscellaneous Aluminum, Tygon®
General
Startup time 8 minutes from full stop
Max. ambient temp. 35 °C
Bakeout temp. 120 °C (regulated heaters, UGA only)
Power requirement 720 W, 85 to 264 VAC or 120 to 370 VDC, 47 to 63 Hz
Dimensions 12 " × 11 " × 27 " (WHL)
Weight 85 lbs. UGA, 75 lbs. ULT
Warranty One year parts and labor on defects in material or workmanship. Pump seals and diaphragm warranted for 90 days.

* ULT Series has different specifications. Please refer to the Comparison sheet for details.

 
 
 
 
 
 
Phone: (408)744-9040 • Fax: (408)744-9049 • email: info@thinkSRS.comwww.thinkSRS.com