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Process Monitoring
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 PPR Process Monitoring Systems
  • 0.01, 0.1, 1.0 or 10 Torr inlet pressure
  • 3 × 10-5 Torr-L/s flow rate
  • 2 second response time (0.1 Torr)
  • 120, 220 or 320 amu systems




 UGAPM Process Monitoring Systems
  • 0.001 to 20 Torr inlet pressure
  • WIndows software
  • <1.5 second response time (0.1 Torr)
  • 120, 220 or 320 amu systems

 UGAPM Process Monitoring Systems
  • 5 fA/√Hz input noise
  • 1 MHz maximum bandwidth
  • 1 pA/V maximum gain



 CIS Residual Gas Analyzer
  • 100, 200, and 300 amu systems
  • 1 ppm detection
  • 10 mTorr max. operating pressure
  • RGA and CIS mode




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